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Christophe LEMONIAS PETIT MARTENON

Christophe LEMONIAS PETIT MARTENON - Resp. Equipement (pôle lithographie et caractérisation)

Function: Resp. Equipement (pôle lithographie et caractérisation)

Email: christophe.lemonias@cea.fr

Phone: 04 38 78 27 94


Responsible for facilities

Lithography - Mask aligner : MJB4

Metrology - Tools at a glance

Metrology - DEKTAK

Metrology – Nanocalc-vis

Metrology - MEB ZEISS ULTRA +