Metrology – Tools at a glance
Metrology field
- 3 Scanning electron microscope (2 Zeiss Ultra+ and 1 SEM FEG JEOL): observation tools enabling enlargements up to x500,000 with a very great resolution.
- 3 Optical microscopes (LEICA with digital camera)
- Spectroscopic ellipsometer: enables the thickness of transparent films to be controlled with nanometric resolutions.
- 2 Mechanical profilometer: for measuring steps, the resolution is about a hundred nanometers.
Contact : christophe.lemonias@cea.fr