Metrology – Tools at a glance

Metrology field

• 3 Scanning electron microscope (2 Zeiss Ultra+ and 1 SEM FEG JEOL): observation tools enabling enlargements up to x500,000 with a very great resolution.

• 3 Optical microscopes (LEICA with digital camera)

• Spectroscopic ellipsometer: enables the thickness of transparent films to be controlled with nanometric resolutions.

• 2 Mechanical profilometer: for measuring steps, the resolution is about a hundred nanometers.

Contact : christophe.lemonias@cea.fr