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Metrology – Tools at a glance

Metrology field

 

  • 3 Scanning electron microscope (2 Zeiss Ultra+ and 1 SEM FEG JEOL): observation tools enabling enlargements up to x500,000 with a very great resolution.

 

  • 3 Optical microscopes (LEICA with digital camera)

 

  • Spectroscopic ellipsometer: enables the thickness of transparent films to be controlled with nanometric resolutions.

 

  • 2 Mechanical profilometer: for measuring steps, the resolution is about a hundred nanometers.

 

Contact : christophe.lemonias@cea.fr

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