Metrology – DEKTAK
Caracterisation Dektak DXT "E"
Technical description
5Å - repeatability
3D mapping capability
sample flexibility
Scan Lenght Range 55mm to 200mm
Vertical Range : 1 mm
Vertical Resolution 1Å maximum (at 6.55μm range )
Stress measurements
stylus : 12,5 µm
Stylus force range 1-15 mg
| Contact : |
christophe.lemonias@cea.fr corinne.perret@cea.fr |