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Metrology – DEKTAK


caracterisation Dektak DXTCaracterisation Dektak DXT "E"

Technical description


5Å - repeatability
3D mapping capability
sample flexibility
Scan Lenght Range 55mm to 200mm
Vertical Range : 1 mm
Vertical Resolution 1Å maximum (at 6.55μm range )
Stress measurements
stylus : 12,5 µm
Stylus force range 1-15 mg


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