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Metrology – DEKTAK

 

caracterisation Dektak DXTCaracterisation Dektak DXT "E"

Technical description

 

5Å - repeatability
3D mapping capability
sample flexibility
Scan Lenght Range 55mm to 200mm
Vertical Range : 1 mm
Vertical Resolution 1Å maximum (at 6.55μm range )
Stress measurements
stylus : 12,5 µm
Stylus force range 1-15 mg

 

Contact :

christophe.lemonias@cea.fr

corinne.perret@cea.fr

 

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