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Metrology – Profilometre : KLA P7


Technical description


Product Description

The Tencor P-7 benchtop stylus profiler builds on the success of the market leading Tencor P-17 benchtop stylus profiling system. It includes the superior measurement performance of the P-17 technology in a platform that offers a great price-to-features ratio for a benchtop stylus profiler. The Tencor P-7 stylus profiler supports 2D and 3D measurements of step heights, roughness, bow, and stress for scans up to 150mm without stitching.


  • Step height: Nanometers to 1000µm
  • Low force with constant force control: 0.03 to 50mg
  • Scan full diameter of the sample without stitching
  • Video: 5MP high-resolution color camera
  • Arc correction: Removes error due to arc motion of the stylus
  • Software: Easy-to-use software interface
  • Production capability: Fully automated with sequencing, pattern recognition and SECS/GEM


  • Step height: 2D and 3D step height
  • Texture: 2D and 3D roughness and waviness
  • Form: 2D and 3D bow and shape
  • Stress: 2D and 3D thin film stress
  • Defect review: 2D and 3D defect surface topography




  • KLA Tencor stylus profiler P7
  • Substrate size from 3 x 3 mm up to 150mm diameter 3 mm thickness
  • 2-micron radius 60 cone degree angled tip
  • 0.5 – 50 mg stylus constant force
  • 150mm scan length and 1mm Z range
  • Vertical resolution 0.4 nm
  • Maximum horizontal resolution 25 nm
  • Manual rotation stage
  • 2D / 3D scanning
  • Top view optical navigation camera 2 x 1.2 mm field of view
  • Applications / measurementsThin film / resist step height
    • Thin film / resist step height
    • Surface roughness


Document :


Brochure P7


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