Metrology – Profilometre : KLA P7
Technical description
Product Description
The Tencor P-7 benchtop stylus profiler builds on the success of the market leading Tencor P-17 benchtop stylus profiling system. It includes the superior measurement performance of the P-17 technology in a platform that offers a great price-to-features ratio for a benchtop stylus profiler. The Tencor P-7 stylus profiler supports 2D and 3D measurements of step heights, roughness, bow, and stress for scans up to 150mm without stitching.
Features
- Step height: Nanometers to 1000µm
- Low force with constant force control: 0.03 to 50mg
- Scan full diameter of the sample without stitching
- Video: 5MP high-resolution color camera
- Arc correction: Removes error due to arc motion of the stylus
- Software: Easy-to-use software interface
- Production capability: Fully automated with sequencing, pattern recognition and SECS/GEM
Applications
- Step height: 2D and 3D step height
- Texture: 2D and 3D roughness and waviness
- Form: 2D and 3D bow and shape
- Stress: 2D and 3D thin film stress
- Defect review: 2D and 3D defect surface topography
Specifications
- KLA Tencor stylus profiler P7
- Substrate size from 3 x 3 mm up to 150mm diameter 3 mm thickness
- 2-micron radius 60 cone degree angled tip
- 0.5 – 50 mg stylus constant force
- 150mm scan length and 1mm Z range
- Vertical resolution 0.4 nm
- Maximum horizontal resolution 25 nm
- Manual rotation stage
- 2D / 3D scanning
- Top view optical navigation camera 2 x 1.2 mm field of view
- Applications / measurementsThin film / resist step height
- Thin film / resist step height
- Surface roughness
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