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Thomas CHARVOLIN

Thomas CHARVOLIN - Resp. Equipement (Gravure)

Function: Resp. Equipement (Gravure)

Email: thomas.charvolin@cea.fr

Phone: +33 (0)4 38 78 91 80


Responsible for facilities

Etching tools at a glance

IBE etcher (scia Mill 150 from scia Systems)

ICP Etcher (Plasmalab100 from Oxford)