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Metrology – Ellipsometre SpecEl

Ellipsometre SpecEl



Film Thickness Range: 1nm – 8μm

Thickness Resolution: 0,1nm

n & k Analyzer: Table 450 – 900 nm in 1nm steps


Measurement Speed: 5-15 seconds

Repeatability: 70 nm SiO2 on Si, cos(Delta)
±0.0003, tan(Psi) ± 0.0002

Metrology ellipsometer SpecEl photo


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