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Metrology – Ellipsometre SpecEl

Ellipsometre SpecEl

 

 

Film Thickness Range: 1nm – 8μm


Thickness Resolution: 0,1nm


n & k Analyzer: Table 450 – 900 nm in 1nm steps

 

Measurement Speed: 5-15 seconds


Repeatability: 70 nm SiO2 on Si, cos(Delta)
±0.0003, tan(Psi) ± 0.0002

Metrology ellipsometer SpecEl photo

 

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