Metrology – Ellipsometre Auto SE + SpecEl
Ellipsometre Auto SE
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Technical description :
Spectral range : 440-100 nm Spot sizes : automatic selection >500µm; 500x500 µm; 250x500 µm; 250x250 µm; 70x250 µm; 100x100 µm; 50x60 µm; 25x60 µm Detection : CCD – Resolution: 2 nm
Sample viewing : CCD camera - Field of view: 1.33 x 1 mm – Resolution: 10 µm
Measurement time : 1 s
Accuracy : NIST 100 nm d ± 4 Å, n(632.8 nm) ± 0.002
Repeatability : NIST 15 nm ± 0.2 Å
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Ellipsometre SpecEI
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Technical description :
Film Thickness Range : 1 nm – 8 μm Thickness Resolution : 0,1 nm n & k Analyzer : Table 450 – 900 nm in 1 nm steps Measurement Speed : 5- 15 seconds Repeatability : 70 nm SiO2 on Si, cos(Delta) |
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Document :
Auto SE Ellipsometre-DeltaPsi2
Auto SE Metrology Ellipsometre DeltaPsi2