Metrology – Ellipsometre Auto SE + SpecEl
Ellipsometre Auto SE
Spectral range: 440-1000 nm Spot sizes: automatic selection >500µm; 500x500 µm; 250x500 µm; 250x250 µm; 70x250 µm; 100x100 µm; 50x60 µm; 25x60 µm Detection: CCD – Resolution: 2nm Sample viewing: CCD camera - Field of view: 1.33x1 mm – Resolution: 10µm Measurement time: 1s Accuracy: NIST 100nm d ± 4Å, n(632.8nm) ± 0.002 Repeatability: NIST 15nm ± 0.2 Å |
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Contact : |
christophe.lemonias@cea.fr |
Ellipsometre SpecEl
Film Thickness Range: 1nm – 8μm
Measurement Speed: 5-15 seconds
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Contact : |
thierry.chevolleau@cea.fr christophe.lemonias@cea.fr |