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Metrology – Nanocalc-vis

TECHNICAL DESCRIPTION

2 Nanocalc 

 

Nanocalc-VIS WavelengthMetrology dektak xt 02

Wavelength: 400 - 850 nm

Thickness range: 50 nm - 20 µm

Resolution: 0.1 nm

Repeatability: 0,3 nm

Number of layer : 1

Standard: 200µm or 400µm

 

Nanocalc XR Wavelength

Wavelength: 250 - 1050 nm

Thickness range: 10 nm - 70 µm

Resolution: 0.1 nm

Repeatability: 0,3 nm

Number of layer : 1

Standard: 200µm or 400µm

 

 

 

Contact :

Nanocalc XR Wavelength (BCAI)

 

Nanocalc-VIS Wavelength (1005)

corinne.perret@cea.fr

 

christophe.lemonias@cea.fr

 

PTA user information

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