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Thierry CHEVOLLEAU

Thierry CHEVOLLEAU - Responsable de la zone gravure

Function: Responsable de la zone gravure

Email: thierry.chevolleau@cea.fr

Phone: 04 38 78 45 04


Responsible for facilities

Etching tools at a glance

Etching : CMP Alpsitec (E460C from Alpsitec)

Etching : IBE 01 Plassys (MU400 from Plassys)