Metrology – 4 point probe FPP-5000
Metrology - 4 point probe FPP-5000
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Wafer Size Inscribed on it: 100, 125, 150 mm. 2, 3 In Automated calculation and display of sheet or slice resistivity, V/I, metallization thickness, and P-N type.
Range : 25 mW to 99,9K W
Slice resistivity : 4,19x10-2 m W -cm to 17,1 K W -cm |
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| Contact : |
valentine.bolcato@grenoble-inp.fr |