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Metrology – 4 point probe FPP-5000

Technical description :

 

Wafer Size Inscribed on it: 100, 125, 150 mm. 2, 3 In

Automated calculation and display of sheet or slice resistivity, V/I, metallization thickness, and P-N type.

Range : 25 mW to 99,9K W

Slice resistivity : 4,19x10-2 m W -cm to 17,1 K W -cm

 

Document :

 

Notice 4 Pointes

 

Contact : valentine.bolcato@grenoble-inp.fr

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