En | Fr

Your technological partner

From proof of concept to small production

Home  Facilities  

Metrology – 4 point probe FPP-5000

Technical description :


Wafer Size Inscribed on it: 100, 125, 150 mm. 2, 3 In

Automated calculation and display of sheet or slice resistivity, V/I, metallization thickness, and P-N type.

Range : 25 mW to 99,9K W

Slice resistivity : 4,19x10-2 m W -cm to 17,1 K W -cm


Document :


Notice 4 Pointes


Contact : valentine.bolcato@grenoble-inp.fr

PTA user information

To get full information on that facilitie, connect to user area