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Metrology – AFM Icon Bruker

Technical description :


X-Y scan range : 90μm x 90μm typical , 10μm
Z range : (X-Y-Z) <0.5% typical

Sample size/holder : Up to 8”

Resolution : Up to 128-1024 pix/line

AFM modes : Standard: ScanAsyst, PeakForce Tapping, TappingMode (air), Contact Mode, phase imaging, MFM,Force Spectroscopy, Force Volume, EFM, Force Spectroscopy; Optional: PeakForce QNM,TappingMode (fluid), contactMode (fluid), peakforce tapping (fluid)

Précision : 0,1 nm

Surface mini : 50 nm²

Surface maxi : 100 µm²



Document :


Brochure AFM Icon Bruker

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