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Microwave STRIPPER (Pico µW PCCE 7 from DIENER)

Technical description :

Diener

 

  • Microwave downstream plasma (2,45 GHz, 0-300W, 0.2Torr)
  • 2 gas lines : O2, Ar
  • ambient temperature and no water cooling
  • Size and type of samples : from small samples to 4 inches wafers

 

 

Process capabilities :

 

  • Photoresist stripping (~120nm/min)
  • Organic residues
  • Surfaces activation

 

 

 

 

Contact : marlene.terrier@cea.fr

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