Metrology – 4 point probe FPP-5000
Technical description :
Wafer Size Inscribed on it: 100, 125, 150 mm. 2, 3 In
Automated calculation and display of sheet or slice resistivity, V/I, metallization thickness, and P-N type.
Range : 25 mW to 99,9K W
Slice resistivity : 4,19x10-2 m W -cm to 17,1 K W -cm
Document :
Contact : valentine.bolcato@grenoble-inp.fr