Metrology – AFM Icon Bruker
Technical description :
X-Y scan range : 90μm x 90μm typical , 10μm
Z range : (X-Y-Z) <0.5% typical
Sample size/holder : Up to 8”
Resolution : Up to 128-1024 pix/line
AFM modes : Standard: ScanAsyst, PeakForce Tapping, TappingMode (air), Contact Mode, phase imaging, MFM,Force Spectroscopy, Force Volume, EFM, Force Spectroscopy; Optional: PeakForce QNM,TappingMode (fluid), contactMode (fluid), peakforce tapping (fluid)
Précision : 0,1 nm
Surface mini : 50 nm²
Surface maxi : 100 µm²
Document :