Metrologie – Nanocalc-vis
DESCRIPTION TECHNIQUE :![](http://pta-grenoble.com/wp-content/uploads/2016/05/Metrology-dektak-xt-02.jpg)
2 Nanocalc
Nanocalc-VIS Wavelength
Wavelength: 400 - 850 nm
Thickness range: 50 nm - 20 µm
Resolution: 0.1 nm
Repeatability: 0,3 nm
Number of layer : 1
Standard: 200µm or 400µm
Nanocalc XR Wavelength
Wavelength: 250 - 1050 nm
Thickness range: 10 nm - 70 µm
Resolution: 0.1 nm
Repeatability: 0,3 nm
Number of layer : 1
Standard: 200µm or 400µm
Contact : |
Nanocalc XR Wavelength (BCAI)
Nanocalc-VIS Wavelength (1005) |
corinne.perret@cea.fr
christophe.lemonias@cea.fr |