Metrology – DEKTAK DXT “E”
Technical description
sample flexibility
repeatability : 5Å
Scan Lenght Range : 55mm to 200mm
Vertical Range : 1 mm
Vertical Resolution : 1Å maximum (at 6.55μm range )
Stress measurements
stylus : 12,5 µm
Stylus force : range 1-15 mg
Document :
Metrology Dektak XT Manuel constructeur
Metrology Dektak XT Notice utilisateur