Lithography – Laser : Heidelberg
HEIDELBERG Instrument
µPG 101
Write Mode
| Mode | I | II | IV |
| Minimum Structure Size [μm] | 0.6 | 1 | 5 |
| Write Speed [mm2 /minute] | 1 | 5 | 90 |
| Address Grid [nm] | 20 | 40 | 200 |
| Edge Roughness [3σ,nm] | 100 | 120 | 400 |
| Line Width Uniformity [3σ,nm] | 150 | 200 | 800 |
| Aligment Measurement Accuracy [3σ,nm] | 200 | 200 | 800 |
Substrates up to 6“ x 6“
Structures down to 0.6 μm
| Contact : |
nicolas.chaix@cea.fr jean-luc.thomassin@cea.fr christophe.lemonias@cea.fr |