Microwave STRIPPER (Pico µW PCCE 7 from DIENER)
Technical description :
- Microwave downstream plasma (2,45 GHz, 0-300W, 0.2Torr)
- 2 gas lines : O2, Ar
- ambient temperature and no water cooling
- Size and type of samples : from small samples to 4 inches wafers
Process capabilities :
- Photoresist stripping (~120nm/min)
- Organic residues
- Surfaces activation